surface micromachining การใช้

• This surface micromachining process becomes the foundation of high volume airbag accelerometers.
• All the cantilevers are made entirely out of silicon, using surface micromachining at the wafer surface.
• "' MEMS concept "'mirrors are fabricated using bulk and surface micromachining technologies.
• Analog Devices has pioneered the industrialization of surface micromachining and has realized the co-integration of MEMS and integrated circuits.
• Surface micromachining uses layers deposited on the surface of a substrate as the structural materials, rather than using the substrate itself.
• He and his Ph . D . advisor, Prof . Richard S . Muller at Berkeley, developed polysilicon surface micromachining technology.
• Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate.
• Whereas surface micromachining creates structures " on top " of a substrate, bulk micromachining produces structures " inside " a substrate.
• The original surface micromachining concept was based on thin polycrystalline silicon layers patterned as movable mechanical structures and released by sacrificial etching of the underlying oxide layer.
• Like surface micromachining, bulk micromachining can be performed with wet or dry etches, although the most common etch in silicon is the anisotropic wet etch.
• In the 1980s, surface micromachining techniques were developed and the technology was applied to the fabrication of switches, allowing for smaller, more efficient relays.
• An RF MEMS fabrication process is based on surface micromachining techniques, and allows for integration of SiCr or RFIC fabrication processes require 13 to 25 lithography steps.
• Muller and his student Roger Howe created the process of surface micromachining using polysilicon ( poly ) as a structural material, and silicon oxide as a sacrificial layer.
• The size of the substrates can also be much larger than a silicon wafer, and surface micromachining is used to produce PET substrates or other non-rigid materials.
• Recently, through the use of a novel diffractive diffuse system composed of two microlens arrays, surface micromachining by ArF laser on fused silica has been performed with submicrometer accuracy.
• The surface micromachining process is the fundamental process for many consumer, industrial, and military devices today, including microphones, pressure sensors, electronic filters, spectrometers, and e-readers.
• Surface micromachining was created in the late 1980s to render micromachining of silicon more compatible with planar integrated circuit technology, with the goal of combining MEMS and integrated circuits on the same silicon wafer.